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Introduction to Microelectronic Fabrication, Volume 5

Introduction to Microelectronic Fabrication, Volume 5 - 2nd edition

Introduction to Microelectronic Fabrication, Volume 5 - 2nd edition

ISBN13: 9780201444940
ISBN10: 0201444941
Introduction to Microelectronic Fabrication, Volume 5 by Richard C. Jaeger - ISBN 9780201444940
Cover type: Paperback
Edition: 2ND 02
Copyright: 2002
Publisher: Prentice Hall, Inc.
Published:
International: No
Introduction to Microelectronic Fabrication, Volume 5 by Richard C. Jaeger - ISBN 9780201444940
ISBN13: 9780201444940
ISBN10: 0201444941
Cover type: Paperback
Edition: 2ND 02
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Summary

Introduction to Microelectronic Fabrication, Second Edition, by Richard C. Jaeger, is a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing and is highlighted by careful explanations, clean, simple language, and numerous fully solved example problems. The second edition includes an entirely new chapter on MEMS, as well as substantial modifications to the chapters on MOS and bipolar process integration. Also included is new or expanded coverage of lithography and exposure systems, trench isolation, chemical mechanical polishing, shallow junctions, transient enhanced diffusion, copper Damascene processes and process simulation.

Author Bio

Jaeger, Richard C. : Auburn University

Table of Contents

Table of Contents

Other Editions of Introduction to Microelectronic Fabrication, Volume 5

Introduction to Microelectronic Fabrication, Volume V by Richard C. Jaeger - ISBN 9780201146950